SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of a Standard before purchasing. SEMI Standards currently use PDF file format and are DRM-protected, which requires Adobe Acrobat Reader and the FileOpen Plug-In. Refer to the DRM FAQs for details.


Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

 

Artificial Intelligence (AI) Use Prohibited: You may not use the SEMI Standards, or any portion thereof, as input to any artificial intelligence or machine learning system, or for the purpose of training, testing, or improving any AI model. You also may not use AI to create derivative works, adaptations, or other materials derived from or substantially based on SEMI Standards, including but not limited to annotations, outlines, training materials, reference guides, or transformed versions, in any form or for any purpose. Any violation of this policy constitutes a breach and will result in suspended access to SEMI Standards.

C00345 - SEMI C3.45 - 헥사플루오로에탄(C2F6) 표준, 99.996% 품질(임시)
SEMI C3.45 - 헥사플루오로에탄(C2F6) 표준, 99.996% 품질(임시) 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00347 - SEMI C3.47 - 브롬화수소(HBr) 사양, 99.98% 품질
SEMI C3.47 - 브롬화수소(HBr) 사양, 99.98% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00348 - SEMI C3.48 - 질소(N2) 표준, 벌크 액체, 99.9994% 품질
SEMI C3.48 - 질소(N2) 표준, 벌크 액체, 99.9994% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00349 - SEMI C3.49 - 벌크 질소(N2) 표준, 99.99999% 품질
SEMI C3.49 - 벌크 질소(N2) 표준, 99.99999% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00351 - SEMI C3.51 - 삼염화붕소(BCl3) 사양, 99.98% 품질
SEMI C3.51 - 삼염화붕소(BCl3) 사양, 99.98% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00352 - SEMI C3.52 - 육불화텅스텐 표준, 99.996% 품질
SEMI C3.52 - 육불화텅스텐 표준, 99.996% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00353 - SEMI C3.53 - 삼불화메탄(Chf3) 표준, 99.95% 품질
SEMI C3.53 - 삼불화메탄(Chf3) 표준, 99.95% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00354 - SEMI C3.54 - 실란(SiH4)에 대한 가스 순도 지침
SEMI C3.54 - 실란(SiH4)에 대한 가스 순도 지침 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00355 - SEMI C3.55 - 실란(SiH4) 사양, 벌크, 99.994% 품질
SEMI C3.55 - 실란(SiH4) 사양, 벌크, 99.994% 품질 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00356 - SEMI C3.56 - 디보란 혼합물 사양
SEMI C3.56 - 디보란 혼합물 사양 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00357 - SEMI C3.57 - 실린더의 이산화탄소, CO2, 전자 등급 사양
SEMI C3.57 - 실린더의 이산화탄소, CO2, 전자 등급 사양 할인 가격Member Price: ₩113
Non-Member Price: ₩290,000
C00358 - SEMI C3.58 - 옥타플루오로사이클로부탄 사양, C4F8, 실린더의 전자 등급, 99.999% 품질
C00602 - SEMI C6.2 - 파이프라인 가스로 전달되는 등급 20/0.02 산소에 대한 입자 사양
C00603 - SEMI C6.3 - 파이프라인 가스로 전달되는 등급 20/0.2 수소(H2)에 대한 입자 사양
C00604 - SEMI C6.4 - 파이프라인 가스로 전달되는 등급 20/0.02 질소(N2) 및 아르곤(Ar)에 대한 입자 사양
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More