SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of a Standard before purchasing. SEMI Standards currently use PDF file format and are DRM-protected, which requires Adobe Acrobat Reader and the FileOpen Plug-In. Refer to the DRM FAQs for details.


Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

 

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E15600 - SEMI E156 - 搬送intafeースに対する450mm AMHS스톡카의 구조
SEMI E156 - 搬送intafeースに対する450mm AMHS스톡카의 구조 할인 가격Member Price: ₩135
Non-Member Price: ₩348,000
E15700 - SEMI E157 - 모듈 프로세스 추적 사양E15700 - SEMI E157 - 모듈 프로세스 추적 사양
SEMI E157 - 모듈 프로세스 추적 사양 할인 가격 Member Price : ₩113
E15700 - SEMI E157 - 모쥬르프로세스트락킹 사양
SEMI E157 - 모쥬르프로세스트락킹 사양 할인 가격Member Price: ₩135
Non-Member Price: ₩348,000
E15800 - SEMI E158 - 450 mm웨하카리아(450 FOUP)토키네마틱카프링의 구조
E15800 - SEMI E158 - 450mm 웨이퍼(450 FOUP) 및 키네마틱 커플링을 운송 및 보관하는 데 사용되는 Fab 웨이퍼 캐리어의 기계적 특징에 대한 사양
E15900 - SEMI E159 - 450mm 웨이퍼 운송 및 배송에 사용되는 MAC(Multi Application Carrier)의 기계적 기능 사양
E15900 - SEMI E159 - 웨하노 搬送及び, 輸送のための多目的캘리아(MAC:Multi Application Carrier)의 機械仕様
E16000 - SEMI E160 - 데이터 품질 통신 사양
SEMI E160 - 데이터 품질 통신 사양 할인 가격Member Price: ₩113
Non-Member Price: ₩291,000
E16100 - SEMI E161 - 교육 계층 식별 및 분류 가이드
SEMI E161 - 교육 계층 식별 및 분류 가이드 할인 가격Member Price: ₩113
Non-Member Price: ₩291,000
E16100 - SEMI E161 - 트레이닝 교육의 명찰화 정보 공유 가이드
SEMI E161 - 트레이닝 교육의 명찰화 정보 공유 가이드 할인 가격Member Price: ₩135
Non-Member Price: ₩348,000
E16200 - SEMI E162 - 450 mm프론트오프닝・쉽핑박스・로드포트의 메카니카루인타페스의 구조
E16200 - SEMI E162 - 450mm 전면 개방 배송 상자 로드 포트에 대한 기계적 인터페이스 사양
E16300 - SEMI E163 - 특별히 지정된 영역 내에서 레티클 및 기타 극도로 정전기에 민감한(EES) 항목 취급 가이드
E16300 - SEMI E163 - 특별 사양에 따른 Eria의 레치크루 およびその他の静電気超敏感性(EES:EXTREMELY ELECTROSTATIC SENSITIVE)
E16400 - SEMI E164 - EDA 공통 메타데이터 사양
SEMI E164 - EDA 공통 메타데이터 사양 할인 가격Member Price: ₩113
Non-Member Price: ₩291,000
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More