SEMI Standards

SEMI Standards are voluntary technical agreements for the semiconductor, flat panel display, micro-electromechanical systems, photovoltaic, and high-brightness LED industries.

Historical Individual Standards

Historical versions of SEMI Standards are available for purchase. If a document is not available on the Historical Standards page, please contact customer service at 408.943.6901, or by email at customerservice@semi.org, to request that it be added.

Please be aware that information contained in older versions of SEMI Standards may be obsolete. SEMI encourages the use of current Standards.

상품 857개

F09200 - SEMI F92 - 1.5インチタイプ2ファスナー構造サーフェスマウント型ガス供給システム用コンパクトサイズ3ポートコンポーネントの寸法のための仕様
E12600 - SEMI E126 - 装置品質情報파라메타(EQIP)에 가능한 사양
SEMI E126 - 装置品質情報파라메타(EQIP)에 가능한 사양 할인 가격Member Price: ₩135
Non-Member Price: ₩287,000
F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
E03700 - SEMI E37 - HSMS의 일반적 서비스(HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES)
E03500 - SEMI E35 - 半導体製造装置のCOO測定方法の計算ガイド
SEMI E35 - 半導体製造装置のCOO測定方法の計算ガイド 할인 가격Member Price: ₩135
Non-Member Price: ₩287,000
S02400 - SEMI S24 - 複数企業同時作業エリアの安全ガイドライン
SEMI S24 - 複数企業同時作業エリアの安全ガイドライン 할인 가격Member Price: ₩135
Non-Member Price: ₩287,000
F08200 - SEMI F82 - 1.125インチタイプサーフェスマウント型ガス供給システム用マスフローコントローラ/マスフローメータの寸法のための仕様
F00500 - SEMI F5 - Guide for Gaseous Effluent Handling
SEMI F5 - Guide for Gaseous Effluent Handling 할인 가격Member Price: ₩113
Non-Member Price: ₩240,000
E09500 - SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment 할인 가격Member Price: ₩113
Non-Member Price: ₩240,000
F09600 - SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様
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