SEMI Standards

SEMI Standards are voluntary technical agreements for the semiconductor, flat panel display, micro-electromechanical systems, photovoltaic, and high-brightness LED industries.

1580 products

F102000 - SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement Sale priceMember Price: $113.00
Non-Member Price: $170.00
F00900 - SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition
SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition Regular price$300.00 USD Sale price$170.00 USD
S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Sale priceMember Price: $113.00
Non-Member Price: $170.00
F04600 - SEMI F46 -
SEMI F46 - Sale priceMember Price: $135.00
Non-Member Price: $180.00
F01100 - SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$170.00 USD
F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing
SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Sale priceMember Price: $113.00
Non-Member Price: $170.00
F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems Regular price$300.00 USD Sale price$170.00 USD
F09400 - SEMI F94 - 1.5インチタイプ4ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様
SEMI F94 - 1.5インチタイプ4ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様 Sale priceMember Price: $135.00
Non-Member Price: $203.00
F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Regular price$300.00 USD Sale price$170.00 USD
F08800 - SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps
SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Sale priceMember Price: $113.00
Non-Member Price: $170.00
F06600 - SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様
SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様 Regular price$360.00 USD Sale price$203.00 USD
F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法
SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 Regular price$360.00 USD Sale price$203.00 USD
S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment Sale priceMember Price: $113.00
Non-Member Price: $170.00
S01600 - SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド
SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド Sale priceMember Price: $135.00
Non-Member Price: $203.00
S02700 - SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports Sale priceMember Price: $113.00
Non-Member Price: $170.00
F00600 - SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン）
SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン） Regular price$360.00 USD Sale price$203.00 USD
S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン
SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Sale priceMember Price: $135.00
Non-Member Price: $203.00
E07400 - SEMI E74 - 真空ポンプのインタフェースの仕様　－　ターボモレキュラーポンプ
SEMI E74 - 真空ポンプのインタフェースの仕様　－　ターボモレキュラーポンプ Sale priceMember Price: $135.00
Non-Member Price: $203.00
F08300 - SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
S02800 - SEMI S28 - 針對預計應用於半導體生產設備之機器人與之安全指導方針
SEMI S28 - 針對預計應用於半導體生產設備之機器人與之安全指導方針 Sale priceMember Price: $113.00
Non-Member Price: $170.00
E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)
SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $113.00
Non-Member Price: $170.00
F09000 - SEMI F90 - Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
SEMI F90 - Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
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