SEMI Standards

SEMI Standards are voluntary technical agreements for the semiconductor, flat panel display, micro-electromechanical systems, photovoltaic, and high-brightness LED industries.

1580 products

F08900 - SEMI F89 - Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
SEMI F89 - Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
S02900 - SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド
SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド Sale priceMember Price: $135.00
Non-Member Price: $203.00
F06500 - SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様
SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様 Regular price$360.00 USD Sale price$203.00 USD
F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials
SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$170.00 USD
F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Sale priceMember Price: $113.00
Non-Member Price: $170.00
F00800 - SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法
SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法 Sale priceMember Price: $135.00
Non-Member Price: $203.00
F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures
SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures Regular price$300.00 USD Sale price$170.00 USD
F00900 - SEMI F9 - サイドロード状態に置かれた場合のフロロカーボン製チューブフィッティング接合部の漏洩特性を測定する試験方法
SEMI F9 - サイドロード状態に置かれた場合のフロロカーボン製チューブフィッティング接合部の漏洩特性を測定する試験方法 Regular price$360.00 USD Sale price$203.00 USD
F10600 - SEMI F106 - ヘリウム漏れ検出器によるガス供給システムの漏れ完全性を確認するためのテスト方法
SEMI F106 - ヘリウム漏れ検出器によるガス供給システムの漏れ完全性を確認するためのテスト方法 Regular price$360.00 USD Sale price$203.00 USD
F08800 - SEMI F88 - 1.5インチタイプサーフェスマウント型ガス供給システム用スタンダードサイズマスフローコントローラ／マスフローメータの寸法のための仕様
SEMI F88 - 1.5インチタイプサーフェスマウント型ガス供給システム用スタンダードサイズマスフローコントローラ／マスフローメータの寸法のための仕様 Sale priceMember Price: $135.00
Non-Member Price: $203.00
E08100 - SEMI E81 - Provisional Specification for CIM Framework Domain Architecture
SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: $113.00
Non-Member Price: $170.00
F07100 - SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System
SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System Regular price$300.00 USD Sale price$170.00 USD
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $113.00
Non-Member Price: $170.00
E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment
SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment Sale priceMember Price: $113.00
Non-Member Price: $170.00
E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles Sale priceMember Price: $113.00
Non-Member Price: $170.00
E12400 - SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics
SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics Sale priceMember Price: $113.00
Non-Member Price: $170.00
E05409 - SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP
SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP Sale priceMember Price: $113.00
Non-Member Price: $170.00
E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers Sale priceMember Price: $113.00
Non-Member Price: $170.00
E06400 - SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port Sale priceMember Price: $113.00
Non-Member Price: $170.00
E10400 - SEMI E104 - Specification for Integration and Guideline for Calibration of Low-pressure Particle Monitor
SEMI E104 - Specification for Integration and Guideline for Calibration of Low-pressure Particle Monitor Sale priceMember Price: $113.00
Non-Member Price: $170.00
P02200 - SEMI P22 - Guideline for Photomask Defect Classification and Size Definition
SEMI P22 - Guideline for Photomask Defect Classification and Size Definition Sale priceMember Price: $113.00
Non-Member Price: $170.00
E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers
SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Sale priceMember Price: $113.00
Non-Member Price: $170.00
E04800 - SEMI E48 - Specification for SMIF Indexer Volume Requirement
SEMI E48 - Specification for SMIF Indexer Volume Requirement Sale priceMember Price: $113.00
Non-Member Price: $170.00
E16200 - SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様
SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様 Sale priceMember Price: $135.00
Non-Member Price: $203.00
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