SEMI M71 - CMOS LSI용 시리콘・온・인슈레이타(SOI) 웨하노타메 사양 -

Name: M07100 - SEMI M71 - CMOS LSI용 시리콘・온・인슈레이타(SOI) 웨하노타메 사양
Brand: semi.org
SKU: 4895
Price: 285000.0 KRW
Availability: InStock

Member Price: ₩135

Non-Member Price: ₩285,000

Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
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개정:

SEMI M71-0310 - 대체됨

품목 옵션

Abstract

本standared는 글로벌 실리콘 웨이퍼 위원회 で技術的に承認されている。現版は2010年1 月20日，global Audits and Reviews Subcommittee にて発行が承認された。2010 年2 月にwww.semi.org で入手可能となる.初版は2007 年11 月に発行された.

本仕様は, CMOS大規模集積回路（ LSI ：대규모 집적회로 ）Debais用の薄膜시리콘・온・인슈레이타（SOI：silicon-on-insulator ）we-hana 要求条件を規定するものである.本仕그래, 130nm技術ノード以降（ 65nm ， 45nm等）のLSI용200mm および300mmWe-haを対象としている.ータ，検査手順および受入基準を規定することにより，サプライヤと顧客双方が，製品の特性および品質要求条件を一貫して定義するのがよい。

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SEMI M71 - CMOS LSI용 시리콘・온・인슈레이타(SOI) 웨하노타메 사양 -

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