SEMI M43 - 웨하나노포트그라피 -

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Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI M43-0301 - 대체됨

개정

Abstract

本가이드는，Global Silicon Wafer Committeeで技術的に承認されたもので，North American Silicon Wafer Committeeが直接責任を負うものである。현재 는 11월 22 일 North American Regional Standards Committee 에によって承認され타。 2000年12月にまずwww.semi.orgで入手可能となり，2001年3月に発行に至る。

本gaidは, siriconwe-haに関する 나노포트그라피 面特徴を報告するためのフレームworkを提供する.

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