M01500 - SEMI M15 - 반 절연 갈륨 비소 웨이퍼에 대한 광택 웨이퍼 결함 한계 표

SEMI M15 - 반 절연 갈륨 비소 웨이퍼에 대한 광택 웨이퍼 결함 한계 표 -

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Volume(s): Materials
Language: English

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Type: Single Standards Download (.pdf)

개정: SEMI M15-0298 - 비활성

개정

Abstract

이 문서는 허용 가능한 연마된 반 절연 갈륨 비소(GaAs) 웨이퍼가 나타낼 수 있는 유형별 최대 결함 수를 정의합니다.

　

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