SEMI G67 - シート材料から発生する粒子の測定の試験方法 -

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Volume(s): Packaging
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI G67-0996(0811 재승인) - 대체됨

개정

Abstract

本standanardは， global Assembly & Packaging Technical Committee で技術的に承認されている。現版は2011年7月1日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年8月にwww.semiviews .org およびwww.semi.org 에서 1996년 9 월 20일 이전. 2004년 11 월 9일.

　

注意: 本文書は，編集上の修正を伴い再承認された.

　

この試験方法は, シート材料上の粒子を測定するための手順を記述する.

　

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