SEMI G6 - 検査方法 封止ring平坦度 -

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개정

Abstract

本仕様は，封止반지와 封止반지上の固定された3点によって定義される基準面との間の最大偏差を決定する方法に関するものでもる。この方法は8. 382mm ( 0.330² ) ×8.382 mm （ 0.330 ² ）以下の部品には適用されない。

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