SEMI F38 - 유스포인트가스 필터의 効率資格付けを目的試験方法 -

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Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI F38-0699(0611 재승인) - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 는 1999 년 6월부터 시작됩니다 .

　

注意: 本文書は，編集上の修正を伴い再承認された.

　

本文書の目的は, ユースポint(POU)gasfirtaを使用して達成可能なpartiquel濾過効率を資格付けるための，包括的な標準試験シーケンスを定義することである.

　

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