SEMI F37 - 가스 供給 System構成部品の表面粗 さ parameterの算出方法 -

Member Price: ₩135
Non-Member Price: ₩285,000

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

개정: SEMI F37-0299(0611 재승인) - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 는 2004년 11월부터 시작됩니다 .

　

注意: 本文書は，編集上の修正を伴い再承認された.

　

この試験方法の目的は，gas供給system構成部品上で測定される表面粗さparameterの数値を算出する方法を定義する ことである。のは, この試験方法의利用者間で比較可能なデーターを作成する ことである.

　

참조된 SEMI 표준

없음.

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Customer Reviews

Be the first to write a review
0%
(0)
0%
(0)
0%
(0)
0%
(0)
0%
(0)

You May also Like

SEMICON WEST T-Shirt (Green)
SEMICON WEST TShirt (Green) 정상 가격₩23,000 KRW 할인 가격₩15,000 KRW
SEMICON WEST Hoodie (Green)
SEMICON WEST Hoodie (Green) 정상 가격₩23,000 KRW 할인 가격₩16,000 KRW
SEMICON WEST T-Shirt (Green)
SEMICON WEST TShirt (Green) 정상 가격₩22,000 KRW 할인 가격₩15,000 KRW
매진
SEMICON WEST T-Shirt (Green)
SEMICON WEST TShirt (Green) 정상 가격₩17,000 KRW 할인 가격₩15,000 KRW
SEMICON WEST Hoodie (Green)
SEMICON WEST Hoodie (Green) 정상 가격₩22,000 KRW 할인 가격₩15,000 KRW