SEMI F29 - 가스소스시스템 판넬의 파지 성능 테스트 방법 -

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Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI F29-0997(0611 재승인) - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 에서는 2003 년 9 월부터 시작합니다 .

　

本文書が定義しているのは，半導体製造に使用されるgasso-ssystemnopaーji効果の最低許容レベルを決定するため推奨されるパージ効果test方法である.それはさらにgassoース機器の調達の助となることを意図している.

　

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