SEMI C71 - 三塩化ホウウ素(BCI3) 仕様 およびgaid -

개정: SEMI C71-0611 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 에서 거래가 가능합니다.

　

本文書の目的は，半導体産業で用される三塩化ホウ素(BCl 3 )の仕様およびgaidを提供する ことである.

　

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SEMI C3 — 가스 사양


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