SEMI C50 - 트리메치르호스핀 가이드 -

개정: SEMI C50-1110 - 비활성

개정

Abstract

本仕様は， global Liquid Chemicals Committee で技術的に承認されている。現版は20 10年8月27日， global Audits and Reviews Subcommittee にて発行が承認された。 20 10 年10 月にwww.semi .org 에서 1995년 11월 11 일 이전.

本文書の目的は，半導体産業で 用用 されるTrimeChirHosfinに対する要求条件を標準化し，matataこれらのstandardをsapot сる試験手順を標準化する ことである.試験方法は，統計的に有効な結果を示して좋다。

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SEMI C1 — 액체 화학물질 분석 가이드

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