SEMI C3.55 - 실란(SiH4)，바르크，품목99.994%의 仕様 -

Member Price: ₩135
Non-Member Price: ₩282,000

Volume(s): Gases
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI C3.55-1011 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年9月12日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年10月にwww.semiviews.orgおよびwww.semi.org 에서 2000 년 2 월 발간.

　

本文書の目的は，半導体産業で使用されるシラン(SiH 4 )の仕様を提供するものである.

　

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