C00347 - SEMI C3.47 - 臭化水素（HBr），品質99.98%の仕様

SEMI C3.47 - 臭化水素（HBr），品質99.98%の仕様 -

Member Price: ₩135
Non-Member Price: ₩347,000

Volume(s): Gases
Language: Japanese

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Type: Single Standards Download (.pdf)

개정: SEMI C3.47-1011 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年9月12日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年10月にwww.semiviews.orgおよびwww.semi.org 에서 1993년 12월 20일. 2001년 11월 11일

　

本文書の目的は，半導体産業にて使用される臭化水素（ HBr ）の仕様を提供することである.

　

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