C00327 - SEMI C3.27 - 삼화화호우(BF3), 실린다입, 99.0% 제품의 仕様

SEMI C3.27 - 삼화화호우(BF3), 실린다입, 99.0% 제품의 仕様 -

Member Price: ₩135
Non-Member Price: ₩347,000

Volume(s): Gases
Language: Japanese

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Type: Single Standards Download (.pdf)

개정: SEMI C3.27-1102(1011 재승인) - 대체됨

개정

Abstract

本standared는, global Gases Technical Committee で技術的に承認されている。現版は2011年9 月12日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年10月にwww.semiviews.orgおよびwww.semi.org 에서 入手可能となる. 初版は1984年発行.

　

注意: 本文書は，編集上の修正を伴い，再承認された。

　

本文書の目的は，半導体産業で使用されるジシラン(Si2H6)の仕様を提供する ことである.

　

참조된 SEMI 표준

SEMI C1 — 시약 사양
SEMI C3 — 가스 사양

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