SEMI C3.6 - 실린다중노호스핀(PH3), 상품質99.98% の仕様 -

Member Price: ₩135
Non-Member Price: ₩297,000

Volume(s): Gases
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI C3.6-0710 - 대체됨

개정

Abstract

本standanardは， global Gases Committee で技術的に承認されている。現版は2010年4月30日， global Audits and Reviews Subcommittee にて発行が承認された。 2010年6 月にwww.semi.org で入手可能となる. 初版は1981 年発行。前版は，2001 年7 月発行。

 

本文書の目的は，半導体産業で使用されるホスfin (PH 3 ) の仕様を提供する ことである.

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