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SEMI M15 - 半絶縁ガリウムヒ素ウェーハの研磨ウェーハ欠陥限界表 -
Volume(s):
Materials
Language:
English
Type: Single Standards Download (.pdf)
Abstract
この文書では、許容可能な研磨済み半絶縁ガリウムヒ素 (GaAs) ウェーハが示す可能性のある欠陥の最大数を種類ごとに定義しています。 参照されるSEMI規格なし。
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