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SEMI M15 - 半絶縁リウムヒ素ウェーハ用の鏡面ウェーハの屋外表面欠陥表 -
Volume(s):
Materials
Language:
Japanese
Type: Single Standards Download (.pdf)
Abstract
この資料は、鏡面絶縁半ガリウム砒素（GaAs）ウェーハの欠陥をタイプ別にその許容できる最大数を規定している。
参照されるSEMI規格なし。
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