C00332 - SEMI C3.32 - 塩素 (Cl2) の仕様、99.996% の品質

SEMI C3.32 - 塩素 (Cl2) の仕様、99.996% の品質 -

Member Price: ¥113
Non-Member Price: ¥31,900

Volume(s): Gases
Language: English

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Type: Single Standards Download (.pdf)

リビジョン: SEMI C3.32-0920 - 現在

リビジョン

Abstract

この文書の目的は、半導体産業で使用される塩素 (Cl 2 ) の仕様を提供することです。

　

この文書では、半導体産業で使用される塩素の要件について説明します。

　

参照されるSEMI規格

なし。

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