C00306 - SEMI C3.6 - シリンダー内のホスフィン (PH3) の仕様、99.98% の品質

SEMI C3.6 - シリンダー内のホスフィン (PH3) の仕様、99.98% の品質 -

Member Price: ¥113
Non-Member Price: ¥31,900

Volume(s): Gases
Language: English

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Type: Single Standards Download (.pdf)

リビジョン: SEMI C3.6-0421 - 現在

リビジョン

Abstract

この文書の目的は仕様を提供することです 半導体産業で使用されるホスフィン (PH3) の場合。


この文書では、 半導体産業。

参照SEMI規格（別途購入）

SEMI C3 — ガスの仕様

改訂履歴

SEMI C3.6-0421 (技術改訂)

SEMI C3.6-0710 (再承認 0815)

SEMI C3.6-0710 (技術改訂)

SEMI C3.6-0701 (技術改訂)

SEMI C3.6-95 (技術改訂)

SEMI C3.6-93 (技術改訂)

SEMI C3.6-81 (初公開)

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