SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process -

Abstract

This Safety Guideline provides the general principles for risk assessment to identify hazards, risk estimation, and risk evaluation for the lifecycle of semiconductor equipment. It is intended for use by supplier and purchaser as a reference for EHS considerations. By using this Safety Guideline, suppliers and users can identify and implement a risk reduction system to create a safer working environment.

The purpose of this Safety Guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The Document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations.

Use of this Safety Guideline is intended to assist in the development of a strategy to prioritize and control risks.

This Safety Guideline is intended to apply to the assessment of risks considering the lifecycle of the equipment.

This Safety Guideline outlines a hazard identification, risk estimation, and risk evaluation process.

 

Referenced SEMI Standards (purchase separately)

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

 

Revision History

SEMI S10-1119 (technical revision)

SEMI S10-0815E (editorial revision)

SEMI S10-0815 (technical revision)

SEMI S10-0215 (technical revision)

SEMI S10-0115 (technical revision)

SEMI S10-0307E (editorial revision)

SEMI S10-0307 (technical revision)

SEMI S10-1103 (complete rewrite)

SEMI S10-1296 (first published)

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