SEMI G6 - 検査方法　封止リング平坦度 -

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Abstract

本仕様は，封止リングと封止リング上の固定された3点によって定義される基準面との間の最大偏差を決定する方法に関するものである。この方法は8.382 mm（0.330² ）×8.382 mm（0.330² ）以下の部品には適用されない。

　

Referenced SEMI Standards

None.

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