SEMI C61 - Specification for Bar-Code Container Identification -

Abstract

NOTICE: This Document was balloted and approved for withdrawal in 2010.

 

To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI Specification.

This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification.

 

Referenced SEMI Standards (purchase separately)

SEMI C1 — Specification for Reagents

 

Revision History

SEMI C61-0707 (Withdrawn 0114)

SEMI C61-0707 (first published)

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