{"product_id":"m04400-semi-m44-シリコン中の酸素の換算係数ガイド","title":"M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e本スタンダードは，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal \u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003eSilicon Wafer \u003cspan style=\"COLOR: black\"\u003eCommittee\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eで技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e2010\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e12\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e21\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e日，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal Audits and Reviews Subcommittee\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eにて発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e2011\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e2\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003ewww.semiviews.org\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eおよび\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e www.semi.org\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e2001\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月発行，前版は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e2005\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月発行された。\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Heading11\" style=\"MARGIN: 0in 0in 3pt; mso-list: none\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e何\u003cspan style=\"COLOR: black\"\u003e年にもわたり，\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1107 cm\u003cspan style=\"FONT-FAMILY: Arial\"\u003e\u003cspan style=\"COLOR: black; FONT-FAMILY: Symbol; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA; mso-char-type: symbol; mso-symbol-font-family: Symbol\"\u003e\u003cspan style=\"mso-char-type: symbol; mso-symbol-font-family: Symbol\"\u003e-\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eに於ける室温での赤外線吸収ピークからシリコン中の格子間酸素濃度を計算するのに用いる多くの校正係数が世界各地域の標準化開発組織によって標準化されてきている。そのようなすべての標準は，その後シリコン中の酸素濃度と吸収ピークとの相関をより正確に相関付けしている\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003eIOC-88 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e校正係数\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1,2\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eを使用すべく改訂がなされてきている。それにもかかわらず，多くの古い校正係数が工業界において通用したまま残っている。\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0in; mso-list: none\"\u003e\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0in; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eこのガイドは，シリコン中の格子間酸素測定として\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1970\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年以来多くの組織において制定された標準で使用されている換算係数および校正係数をまとめたものである。\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI MF1188 — Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M44-0305 (Reapproved 0211) - Current","offer_id":40234293035075,"sku":"4854","price":231.0,"currency_code":"USD","in_stock":true},{"title":"SEMI M44-0305 - Superseded","offer_id":40234293133379,"sku":"9594","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_8b78e81b-8913-4efa-b345-576c8d64675c.png?v=1776702617","url":"https:\/\/store-dev2.semi.org\/products\/m04400-semi-m44-%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e4%b8%ad%e3%81%ae%e9%85%b8%e7%b4%a0%e3%81%ae%e6%8f%9b%e7%ae%97%e4%bf%82%e6%95%b0%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}