{"product_id":"f05200-semi-f52-dimensional-specification-for-metric-pfa-tubes-for-semiconductor-and-flat-panel-display-manufacturing","title":"F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on www.semi.org August 2001; to be published November 2001. Originally published June 2000.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document defines sizes and their measurement methods of metric tetrafluoroethylene perfluoroalkylvinyl-ether copolymer (PFA) tubes for liquid chemical distribution in semiconductor and flat panel display manufacturing equipment and facilities.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document applies to metric tubes made from PFA.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F52-1101 - Inactive","offer_id":40234344513603,"sku":"11017","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI F52-0600 - Superseded","offer_id":40234344382531,"sku":"10956","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_78d53f10-2eaa-43ac-85bd-eae59ea6d507.png?v=1776702242","url":"https:\/\/store-dev2.semi.org\/products\/f05200-semi-f52-dimensional-specification-for-metric-pfa-tubes-for-semiconductor-and-flat-panel-display-manufacturing","provider":"SEMI Dev 2","version":"1.0","type":"link"}