{"product_id":"f03100-semi-f31-guide-for-bulk-chemical-distribution-systems","title":"F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e This Standard was completely rewritten in 2024.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced Standards and Documents\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI F39 — Guide for Chemical Blending Systems\u003cbr\u003eSEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI F31-0724 (complete rewrite)\u003cbr\u003eSEMI F31-0313 (technical revision)\u003cbr\u003eSEMI F31-0698 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F31-0724 - Current","offer_id":43106896576579,"sku":"17894","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI F31-0313 - Superseded","offer_id":43106896609347,"sku":"4040","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI F31-0698 - Superseded","offer_id":40234251321411,"sku":"10769","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_b87473b6-7b8b-48aa-887a-bd0847cbcbaf.png?v=1776702758","url":"https:\/\/store-dev2.semi.org\/products\/f03100-semi-f31-guide-for-bulk-chemical-distribution-systems","provider":"SEMI Dev 2","version":"1.0","type":"link"}