{"product_id":"e01400-semi-e14-measurement-of-particle-contamination-contributed-to-the-product-from-the-process-or-support-tool","title":"E01400 - SEMI E14 - Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool","description":"\u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eNOTICE: This document was withdrawn in accordance with the Regulations Governing SEMI® Standards in 2003. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThe purpose of this document is to provide a standardized methodology and detailed procedure for measuring the contamination performance of a particular process or tool in terms of the number and size distribution of particles added to a silicon wafer as a result of having been passed through that process tool. \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI M10 — Standard Nomenclature for Identification of Structures and Features on Gallium Arsenide Wafers\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E14-93 (Withdrawn 0303) - Withdrawn","offer_id":40234339205187,"sku":"8123","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_2cc7cd01-153e-4837-a524-da5d2d0ed6c7.png?v=1776702142","url":"https:\/\/store-dev2.semi.org\/products\/e01400-semi-e14-measurement-of-particle-contamination-contributed-to-the-product-from-the-process-or-support-tool","provider":"SEMI Dev 2","version":"1.0","type":"link"}