SEMI P8 - 포트레지스트중의 물분할의 결정 방식 -

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Volume(s): Microlithography
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI P8-0997 - 대체됨

개정

Abstract

この方法は, Karl Fischer滴定をフォtrainist中の水分の測定に適用 しようというものである.電気測定法がEndpointを測定するのに使用されるこの手順は, Karl Fischer 試薬や希釈液とは完全に相溶性であるporima-to溶剤systemからなるレジストに適用できる。レジスト者製造は, この手順が問題のレジストに使用し得るか否かを決定するための相談に応じるべきである.

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