SEMI M63 - 화합물 半導체 에피타키샤르웨하 에 사용하는 사파이아기 板 の 仕様 -

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Volume(s): Materials
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI M63-0306 - 대체됨

개정

Abstract

本仕様は，Global Compound Semiconductor Materials Committee で技術的に承認されている。現版は2006年1月16日、global Audits and Reviews Subcommittee にて発行が承認された。 2006年2 月にwww.semi. org 로, 2006년 3 월에 CD-ROM 으로 전화할 수 있습니다.

E本standard 는 2006년 8 월에 編集上の修正がなされた。修正箇所은R2-2 로.

サファイア基板は，窒化gariumto関連する薄膜のヘtereroepitakisharp成長に使用される。薄膜の特性は，使用される基板の特性に部分的に依存する。これらの仕様は，デバイスの製造に適した薄膜に成長に使用するために必要な判定基準の仕様を提供し，safァia基板の表記法を統一するためのものである.

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