SEMI M34 - SIMOX 웨하를 한정하는 방법 -

개정: SEMI M34-0299 - 대체됨

개정

Abstract

この指針は，半導体装置の製造に用いられる厚さ0.5μm以下の시리콘피룸を持つSIMOXものである.これらの仕様は, SIMOX SOIweーハの包括的な特性を定めている.計測されたparameteryに対する特定値は, 適用のためユーザとサプライヤとの間の合意によって決定されるparameterta，検査要領及び合格基準を定める ことにより，ユーザとサプライヤは共に，一律に製品特性及び品質の要求条件を決める ことができる.

참조된 SEMI 표준

SEMI M1 — 연마된 단결정 실리콘 웨이퍼 사양
SEMI M22 — 유전체 절연(DI) 웨이퍼 사양

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