SEMI M15 - 半絶縁gariumヒ素ウェーハ用 の鏡面 ウェーハの許容表面 欠陥表 -

개정: SEMI M15-0298 - 비활성

개정

Abstract

この資料は，鏡面半絶縁garium砒素(GaAs )we-hana의 欠陥をtype別にその許容できる最大数を規定している.

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