SEMI F26 - 그레이드10/0.2 유기특유가스의 진자에 가능한 사양 -

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Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI F26-0697(0712 재승인) - 대체됨

개정

Abstract

本standared는, global Gases Technical Committee で技術的に承認されている。現版は2012年6月18日， global Audits and Reviews Subcommitteeにて発行が承認された。 2012年7月にwww.semiviews.orgおよびwww.semi.org에서 入手可能となる. 初版は1997年6月発行.

　

本書はグレード10/0.2有毒特殊gassの粒子の最大濃度を設定し，それを検証するための基準方法について記述することを目的とする.

　

本書は8 × 105 Pa （ 8気圧）以下の圧力下で特殊gassystemから供給される有毒gassにのみ適用する。この方法は8 × 105 Pa （ 8気圧）以上の圧力で高圧シリンダから直接산프링을行う場合には適していない.本書は下記に示すgasにのみ適用される.

안모니아( NH 3 )
ヒ化水素( AsH 3 )
호스핀( PH 3 )

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