F01500 - SEMI F15 - SEMI S6への移行

SEMI F15 - SEMI S6への移行 -

Member Price: ₩135
Non-Member Price: ₩347,000

Volume(s): Facilities
Language: Japanese

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Type: Single Standards Download (.pdf)

개정: SEMI F15-0308 (Withdrawn 1011) - Withdrawn

개정

Abstract

本standardは， 글로벌 환경 건강 및 안전 위원회 で技術的に承認されている。現版は2011年9月12日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年10にwww.semiviews .orgおよびwww.semi.org 에서 1993년 9월 20일.

　

참고: 本文書는 2011년，barott投票により廃止が承認された.

　

本文書の目的は, SEMI F15が撤回 され, その技術的な内容がSEMI S6の付属書2 「트레이서 사가스를 사용하기 し て漏洩放出物を測定するたのtest方法」に取って代わられたことを示すことである.

참조된 SEMI 표준

SEMI F15-93(재승인 1104) — 육불화황 추적 가스 및 가스 크로마토그래피를 사용한 인클로저 테스트 방법
SEMI S6 — 반도체 제조 장비의 배기 환기에 대한 EHS 가이드라인

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