SEMI E80 - 마스플로 콘트로라의 姿勢感度(取付位置)決定の試験方法 -

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Volume(s): Equipment Automation Hardware / Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI E80-0299(0710 재승인) - 대체됨

개정

Abstract

本standanardは， global Gases Committee で技術的に承認されている。現版は2010年4月30日， global Audits and Reviews Subcommittee にて発行が承認された。 2010年6 月にwww.semi.org で入手可能となる. 初版は1999年発行.前版は2004 年11 月発行。

 

本試験方法の目的は, MFC に関わる取付姿勢の影響を定量化する標準方法を提供する ことである.

 

本文書は, MFC의 取付けの影響を試験し, 記述する ことに関し, me-ca-to yuuza間의 コミュニケーションに共通のベースを提供するものである.

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