SEMI E77 - 마스플로 콘트로라의 운영 체제의 대용 가스 사용에 관한 방법 -

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Volume(s): Equipment Automation Hardware
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI E77-1104(0710 재승인) - 대체됨

개정

Abstract

本standanardは， global Gases Committee で技術的に承認されている。現版は2010年4月30日， global Audits and Reviews Subcommittee にて発行が承認された。 2010年6 月にwww.semi.org で入手可能となる. 初版は1998年発行.前版は2004 年11 月発行。

 

本試験方法の目的は, 1台のMFCがgasを他のgasに変更したとき,公称平均換算率およびそのMFC 의 流量関数としての換算率を定化することである。

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