SEMI E52 - デジタルマスフローコントローラで用 されるgas，gas混合物 および気化して 用用材料の参照表 -

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Volume(s): Equipment Automation Hardware
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI E52-0611 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 는 1995 년 부터 2010년 3 월까지 계속해서 거래할 수 있습니다.

 

マスフローデバイスで 用用される際のgasを順番に並べた参照表となる，半導体産業で用用されるgasに番号を付けた表を提供する こと。この表あるいはlistはデジタルマスフローデバイスの製作および使用を簡単にする.

　

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