SEMI E16 - 마스후로콘트로라漏洩率の決定 および記述のguide -

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Volume(s): Equipment Automation Hardware / Facilities
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI E16-0611 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 에서 1990년 12월 2004년 11 월 20일.

 

このgaidの目的は，masfro-contro-ra(MFCs)漏洩率の記述および測定のための統一された世界的にも通用する方法を確立する ことである。gas受渡しsystemの漏洩を完全になくすことは，製品の質および性能を維持するうえで重要なことである.このgaidは，製造者およびユーザの間の混乱と誤解を防止するように考えられている。特に機械的な原因による漏洩率と拡散による漏洩率とを区別している.

　

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