SEMI C70 - 완전화탕스텐(WF6) 사양 -

개정: SEMI C70-0611 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年5月13日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年6月にwww.semiviews.orgおよびwww.semi.org 에서 거래가 가능합니다.

 

本文書の目的は，半導体産業で使用される六훗화탕스텐 (WF 6 )の仕様を提供するものである.

　

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