SEMI C3.39 - NF3(三福化窒素) 99.98% 제품 사양 -

Member Price: ₩135
Non-Member Price: ₩285,000

Volume(s): Gases
Language: Japanese
Type: Single Standards Download (.pdf)
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개정: SEMI C3.39-1011 - 대체됨

개정

Abstract

本standardは， global Gases Committee で技術的に承認されている。現版は2011年9月12日， global Audits and Reviews Subcommitteeにて発行が承認された。 2011年10月にwww.semiviews.orgおよびwww.semi.org 에서 1989년 9월 20일. 2004년 3 월.

　

本文書の目的は，半導体産業で用される三福化窒素(NF 3 )の仕様を提供する ことである.

　

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