{"product_id":"p00500-semi-p5-ペリクルの仕様","title":"P00500 - SEMI P5 - ペリクルの仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0pt 21pt; TEXT-ALIGN: justify\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本仕様は、Global Micropatterning Committeeで技術的に承認されたもので、North American Micro lithography Committeeが直接責任を負うものである。現版は、 \u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e2004年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e4 \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e22 \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e日\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003eNorth American Regional Standards Committee \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにて承認されている\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e2004年6月にまずwww.semi.org \u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003eで入手\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e可能となり、2004年7月発行に至る。初版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e1986年発行、前版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e1994 \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年発行。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan\u003e注意: 本書\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eは 2004 年、 \u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eSEMI P5 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e、 \u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eSEMI P5.1 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e、 \u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eSEMI P5.2 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eをまとめて全面的に書き直されました。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本仕様は，フォトリソグラフィ露光システムで使用されるフォトマスクまたはレチクルに使われるペリクルに対する要求項目についての考え方。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003c\/p\u003e\n\u003cp\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cb\u003e参照されるSEMI規格\u003c\/b\u003e\u003cbr\u003e \u003cp\u003e\u003cfont\u003eなし。\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P5-0704 - 置き換えられました","offer_id":40234368467011,"sku":"13003","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_4358dcba-4c2e-49da-8726-e16cbea67ea7.png?v=1776701857","url":"https:\/\/store-dev2.semi.org\/ja-jp\/products\/p00500-semi-p5-%e3%83%9a%e3%83%aa%e3%82%af%e3%83%ab%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}