{"product_id":"m05200-semi-m52-130-nm-90nm-65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド","title":"M05200 - SEMI M52 - 130 nm、90nm、65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド","description":"\u003cp class=\"Indent\" style=\"TEXT-JUSTIFY: inter-ideograph; TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\"\u003e \u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e本基準は、グローバルシリコン\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003eウェーハ委員会で技術的に承認されている。現\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e版は2006年11月21日および2007 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e年1月\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e18日\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e、グローバル監査審査小委員会\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003eにて\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e発行が承認された。 \u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e月にwww.semi.orgで、そして2007年3月にCD-ROM \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eとなりました。初版は2002年\u003cspan style=\"mso-fareast-language: JA\"\u003e11 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行、前版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2006 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e7 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行されました。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e  \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003c\/p\u003e \u003cp\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003eこのガイドは 130 、 90 、 65 、および 45 nm 技術世代における走査型表面検査装置（ Scanning \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eSurface Inspection Systems （ SSIS ））の推奨仕様を提供するものである\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e。 \u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eLLS ））の数と大きさはシリコンウェーハの顧客によって指定される，検査証明書（Certificates of Compliance）に含まれる。か、あるいは同じ供給ヤでも異なる世代の測定システムを使用して測定することがある。システムの調達を可能とすることができる。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cb\u003e参照されるSEMI規格\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E1.9 — 300 mm ウェーハの輸送および保管に使用されるカセットの機械仕様\u003cbr\u003e\u003cfont\u003eSEMI E5 — SEMI 機器通信規格 2 メッセージ内容 (SECS-II)\u003cbr\u003e \u003cfont\u003eSEMI E10 — 機器の信頼性、可用性の定義と測定に関する仕様\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M52-0912 - 置き換えられました","offer_id":40234366435395,"sku":"9636","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M52-0412 - 置き換えられました","offer_id":40234366632003,"sku":"9631","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M52-0307 - 置き換えられました","offer_id":40234366795843,"sku":"9629","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_0c63e8b6-05ac-49f2-9d16-4707980f4de4.png?v=1776702041","url":"https:\/\/store-dev2.semi.org\/ja-jp\/products\/m05200-semi-m52-130-nm-90nm-65nm%e3%81%8a%e3%82%88%e3%81%b345nm%e6%8a%80%e8%a1%93%e4%b8%96%e4%bb%a3%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e7%94%a8%e8%b5%b0%e6%9f%bb%e5%9e%8b%e8%a1%a8%e9%9d%a2%e6%a4%9c%e6%9f%bb%e8%a3%85%e7%bd%ae%e4%bb%95%e6%a7%98%e3%81%ae%e3%81%9f%e3%82%81%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}