{"product_id":"m05000-semi-m50-オーバーレイ法による走査型表面検査システム用捕獲率および偽計数率を決定するための試験方法","title":"M05000 - SEMI M50 - オーバーレイ法による走査型表面検査システム用捕獲率および偽計数率を決定するための試験方法","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本基準は、global Silicon Wafer Committee \u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003eで技術\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e的に承認されている。現版は2010年1\u003cspan style=\"COLOR: black\"\u003e月20日、global Audits and Reviews Subcommittee \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003eにて\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e発行が承認された。 \u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となりました。初版\u003cspan style=\"COLOR: black\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eは2001年\u003cspan style=\"COLOR: black\"\u003e11 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行、前版は\u003cspan style=\"COLOR: black\"\u003e2009 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e11 \u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に発行されました。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003cp\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003cp\u003e \u003c\/p\u003e\n\n \u003ch2 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eSEMI M52は、130nmから45nmまでの技術世代に用いられる走査型表面検査システム（ SSIS ）に求められる捕獲率（ \u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003eCR \u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e： \u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003eCapture rate \u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eキャプチャレート）に適合した要求について規定する。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp\u003e \u003c\/p\u003e\u003c\/span\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003c\/p\u003e\n\n\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-ansi-language: EN-US; mso-bidi-language: AR-SA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e本試験方法は，局所的光散乱（ LLSs ）量を等価光散乱サイズにする視力機能を持った，走査型表面検査システム\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-ansi-language: EN-US; mso-bidi-language: AR-SA; mso-fareast-font-family: 'MS PMincho'\"\u003e（ SSIS \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e）の捕獲率（ \u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-ansi-language: EN-US; mso-bidi-language: AR-SA; mso-fareast-font-family: 'MS PMincho'\"\u003eCR \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e），偽計数率（ \u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-ansi-language: EN-US; mso-bidi-language: AR-SA; mso-fareast-font-family: 'MS PMincho'\"\u003eFCR \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e）および累積的偽計数率（ \u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-ansi-language: EN-US; mso-bidi-language: AR-SA; mso-fareast-font-family: 'MS PMincho'\"\u003eCFCR \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e）を決定することをカバーする。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\n\u003cb\u003e参照されるSEMI規格\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E89 — 測定システム分析 (MSA) のガイド\u003cbr\u003e\u003cfont\u003eSEMI M1 — 研磨単結晶シリコンウェーハの仕様\u003cbr\u003e\u003cfont\u003eSEMI M52 — 130 nm、90 nm、65 nm、および 45 nm テクノロジーのシリコンウェーハ用走査表面検査システムを指定するためのガイド\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI M50-0310 - 置き換えられました","offer_id":40234366173251,"sku":"9622","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_1a1bc855-9e43-45ab-9981-34cda7e496f5.png?v=1776702041","url":"https:\/\/store-dev2.semi.org\/ja-jp\/products\/m05000-semi-m50-%e3%82%aa%e3%83%bc%e3%83%90%e3%83%bc%e3%83%ac%e3%82%a4%e6%b3%95%e3%81%ab%e3%82%88%e3%82%8b%e8%b5%b0%e6%9f%bb%e5%9e%8b%e8%a1%a8%e9%9d%a2%e6%a4%9c%e6%9f%bb%e3%82%b7%e3%82%b9%e3%83%86%e3%83%a0%e7%94%a8%e6%8d%95%e7%8d%b2%e7%8e%87%e3%81%8a%e3%82%88%e3%81%b3%e5%81%bd%e8%a8%88%e6%95%b0%e7%8e%87%e3%82%92%e6%b1%ba%e5%ae%9a%e3%81%99%e3%82%8b%e3%81%9f%e3%82%81%e3%81%ae%e8%a9%a6%e9%a8%93%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}