{"product_id":"m03600-semi-m36-低転位密度gaas基板のエッチピット密度epd測定方法","title":"M03600 - SEMI M36 - 低転位密度GaAs基板のエッチピット密度（EPD）の測定方法","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本試験方法は，Global Compound Semiconductor Committeeで技術的に承認されたもので，日本地区スタンダード委員会材料部会が直接責任を持つ。現版は\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e1999 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年3月\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e17日に日本地区スタンダード委員会にて承認された\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e1999 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年4月にまずSEMI On Line \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となり、1999 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年6 \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行に至る。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e \u003cp class=\"Heading21\" style=\"MARGIN: 0in 0in 6pt; TEXT-INDENT: 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本書は、低転位密度\u003cfont face=\"Times New Roman\"\u003eGaAs \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eウェーハのエッチピット密度（ \u003cfont face=\"Times New Roman\"\u003eEPD \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e）を測定する方法を規定する。\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\n\u003cb\u003e参照されるSEMI規格\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eなし。\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI M36-0699 - 非アクティブ","offer_id":40234360471619,"sku":"9569","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_728367c3-d137-4e18-8e39-d5879ce4cc7e.png?v=1776702050","url":"https:\/\/store-dev2.semi.org\/ja-jp\/products\/m03600-semi-m36-%e4%bd%8e%e8%bb%a2%e4%bd%8d%e5%af%86%e5%ba%a6gaas%e5%9f%ba%e6%9d%bf%e3%81%ae%e3%82%a8%e3%83%83%e3%83%81%e3%83%94%e3%83%83%e3%83%88%e5%af%86%e5%ba%a6epd%e6%b8%ac%e5%ae%9a%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}