{"product_id":"e00600-semi-e6-半導体製造装置の設置に関する文書のガイド","title":"E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eこのガイドは、Global Facilities Committeeで技術的に承認されたもので、North American Facilities Committeeが直接責任を負うものである。現版は\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e2002 \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年11月22 \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e日にNorth American Regional Standards Committee \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eにて承認されて\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eいる\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e2003年1月にまずwww.semi.org \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となり、2003年3 \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行に至る。初版は\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e1982年発行、前版は1996 \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年12 \u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e \u003cp\u003e\u003cstrong\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e注意\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e:\u003c\/span\u003e\u003c\/span\u003e\u003c\/strong\u003e \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e本書は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e2002 年、投票により\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003eSEMI E6 \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003eの全面改訂として承認されました。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e \u003c\/p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003cp\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003c\/span\u003e\u003c\/p\u003e \u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e \u003cp\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e \u003cp\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e半導体産業では装置（半導体製造装置）が多様かつ複雑になっているため、設備（工場ユーティリティ設備）を設計し、装置を設置する人たちにとって重要な問題が生まれている\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: EN-US; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e。を準備し、半導体製造装置を効率的に設置するために必要な情報を装置供給ヤ及び半導体製造業者が標準的な方法で交換しあうことによって、お互いの利益につながるはずである。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e \u003c\/p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003c\/p\u003e\n\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003c\/p\u003e\n\u003cp\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cb\u003e参照されるSEMI規格\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E30 — 製造装置の通信および制御のための汎用モデル (GEM)\u003cbr\u003e SEMI E52 — デジタルマスフローコントローラーで使用されるガスを参照するための実践\u003cbr\u003eSEMI E63 — ツール標準 (BOLT) に対する 300 mm ボックス オープナー\/ローダーの機械仕様\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E6-0303 - 置き換えられました","offer_id":40234258104387,"sku":"3840","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_4c38b8d5-b8f9-44c2-8cd0-5f67648ac00c.png?v=1776702802","url":"https:\/\/store-dev2.semi.org\/ja-jp\/products\/e00600-semi-e6-%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e8%a3%85%e7%bd%ae%e3%81%ae%e8%a8%ad%e7%bd%ae%e3%81%ab%e9%96%a2%e3%81%99%e3%82%8b%e6%96%87%e6%9b%b8%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}