{"product_id":"p03700-semi-p37-specification-for-extreme-ultraviolet-lithography-substrates-and-blanks","title":"P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www.semiviews.org and www.semi.org in June 2013; originally published November 2001; previously published November 2009.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThere are two main purposes of this Standard:\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• To define key specifications for EUV substrates that ensure physical dimensional compatibility with EUV carriers, process equipment, and EUV scanners;\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• To identify and define key properties of EUV substrates and blanks which should be specified in the purchase order between users and suppliers.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard details the physical characteristics and tolerances required for EUV substrates.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard details select film definitions and specifications required for EUV Blanks.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard details additional specifications which should be included in purchase orders for substrates and \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI P1 — Specification for Hard Surface Photomask Substrates\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P37-0613 - Inactive","offer_id":40234357063747,"sku":"11337","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI P37-1109 - Superseded","offer_id":40234357194819,"sku":"12979","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI P37-1102 - Superseded","offer_id":40234357293123,"sku":"12977","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI P37-1101 - Superseded","offer_id":40234357358659,"sku":"12976","price":171.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_c3f75b0e-0b12-47b8-9155-b11002e16c85.png?v=1776701952","url":"https:\/\/store-dev2.semi.org\/en-nl\/products\/p03700-semi-p37-specification-for-extreme-ultraviolet-lithography-substrates-and-blanks","provider":"SEMI Dev 2","version":"1.0","type":"link"}