{"product_id":"e19300-semi-e193-specification-for-300-mm-film-frame-foup-fff","title":"E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, ¶¶ 10.4.1, 10.4.1.2, 10.4.1.3, and Table 2.\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing facilities.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard specifies the external features and dimensions of the film frame FOUP (FFF).\u003cbr\u003e2.2  This Standard specifies the internal dimensions for storing the film frames in the FFF.\u003cbr\u003e2.3  This Standard specifies the areas to ensure automated insertion and removal of the film frames by end effectors.\u003cbr\u003e2.4  This Standard specifies the external dimensions of interfaces for automation tools which are designed for interacting with the FFF.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E1.9 — Mechanical Specification for Cassettes used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E47.1 — Mechanical Specification for FOUPs used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E57 — Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003cbr\u003eSEMI G74 — Specification for Tape Frame for 300 mm Wafers\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E193-0425 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E193-0425 - Current","offer_id":43106833301571,"sku":"18450","price":171.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_2efa43e7-e63f-4461-958b-3342f0f374e8.png?v=1776700904","url":"https:\/\/store-dev2.semi.org\/en-nl\/products\/e19300-semi-e193-specification-for-300-mm-film-frame-foup-fff","provider":"SEMI Dev 2","version":"1.0","type":"link"}