{"product_id":"e12600-semi-e126-specification-for-equipment-quality-information-parameters-eqip","title":"E12600 - SEMI E126 - Specification for Equipment Quality Information Parameters (EQIP)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eThis Standard identifies key equipment quality information parameters, or EQIPs, for equipment process types or groups. The identification of these quality parameters is intended to help equipment users and suppliers specify and utilize capabilities for process control.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eThis Standard is designed to be updated as EQIPs are identified for new and\/or existing equipment process types in this Standard.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eIntended Audience — This Standard is intended for use by OEMs, users, and third party equipment and process control system suppliers who need to achieve equipment and process control of select process quality parameters, utilizing standardized methods for actuation of process control parameters.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eThe scope of this Standard is limited to identifying key EQIPs for select equipment process types, specifying that the equipment shall indicate a non-null list of settable process program parameters that impact each of these EQIPs, and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods. The Standard is not intended to identify all quality parameters. It is not intended to specify a complete set of equipment types.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eWhile this Standard requires that a capability shall exist for actuation of process program parameters to influence key EQIPs, the Standard does not specify how this actuation will take place. For example, it does not define the communication protocol for actuation or the equipment or host models that will support and enable this actuation capability. The scope is limited to defining the key EQIPs and their linking to process program parameters.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eThe Standard is structured so that EQIPs for equipment types may be added to an existing set, as the community reaches consensus on these additions. Further, EQIPs may be defined for a new equipment type not previously addressed in this Standard. Additions to the Standard are made utilizing the SEMI Standards balloting process.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E40 — Specification for Processing Management\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E94 — Specification for Control Job Management\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0708 (Reapproved 0823)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0708 (Reapproved 0518)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0708 (Reapproved 0613)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0708 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0308 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0305 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0704 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;'\u003eSEMI E126-0703 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E126-0708 (Reapproved 0823) - Current","offer_id":43106903228483,"sku":"17049","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0708 (Reapproved 0518) - Superseded","offer_id":43106903261251,"sku":"3743","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0708 (Reapproved 0613) - Superseded","offer_id":40234248929347,"sku":"7759","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0708 - Superseded","offer_id":40234248994883,"sku":"7227","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0308 - Superseded","offer_id":40234249093187,"sku":"7225","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0305 - Superseded","offer_id":40234249257027,"sku":"7224","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI E126-0704 - Superseded","offer_id":40234249388099,"sku":"7226","price":171.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_df0da309-aa94-473a-837a-310d0705472d.png?v=1776702883","url":"https:\/\/store-dev2.semi.org\/en-nl\/products\/e12600-semi-e126-specification-for-equipment-quality-information-parameters-eqip","provider":"SEMI Dev 2","version":"1.0","type":"link"}